JPH0457682U - - Google Patents
Info
- Publication number
- JPH0457682U JPH0457682U JP9992090U JP9992090U JPH0457682U JP H0457682 U JPH0457682 U JP H0457682U JP 9992090 U JP9992090 U JP 9992090U JP 9992090 U JP9992090 U JP 9992090U JP H0457682 U JPH0457682 U JP H0457682U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- gas
- chamber
- load lock
- lock chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9992090U JPH0457682U (en]) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9992090U JPH0457682U (en]) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0457682U true JPH0457682U (en]) | 1992-05-18 |
Family
ID=31842189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9992090U Pending JPH0457682U (en]) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0457682U (en]) |
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1990
- 1990-09-25 JP JP9992090U patent/JPH0457682U/ja active Pending